Publications

Show all

Journal Articles

1.

Semenov,; Puzikov,; Dobrotvorskaya,; Fedorov,; Lopin,

Nanocrystalline SiC films prepared by direct deposition of carbon and silicon ions (Journal Article)

Thin Solid Films, 516 (10), pp. 2899-2903, 2008.

(Abstract | Links | BibTeX | Tags: Deposition, Ions, Nanocrystalline films, Nanocrystalline materials, Silicon carbide, Silicon carbide films, Substrate temperature)